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Some knowledge points of foam polishing pads

Foam polishing pad, method for manufacturing the same, and method for manufacturing a semiconductor device using the same.

03 2022/05

Some knowledge points of foam polishing pads

Foam polishing pad apparatus and method

A method for manufacturing a cast polyurethane elastomer with improved light transmittance of a foam polishing pad and its application as a window material for a foam polishing pad A method for manufacturing a cast polyurethane elastomer, the method includes specific casting and molding process conditions, etc. A casting mixture comprising an isocyanate-terminated polyurethane prepolymer, a diamine-based chain extender, and a fluorocarbon-based compound is formed, and then the casting mixture is allowed to dwell at a specific temperature for a period of time, and finally cured.

29 2022/04

Foam polishing pad conditioner and method of making the same

A processing device and a processing method for a foam polishing pad, and a foam polishing pad obtained therefrom, the processing device comprises a gear type cutter, and the polishing pad can be processed by multiple rows of gear cutters, thereby improving the working efficiency of the foam polishing pad groove processing ; The polishing pad processing method using the processing device not only solves the problem that the plunge milling tool cannot perform complete cutting.

27 2022/04

Foam polishing pad conditioner and method of making the same

Manufacturing method of foam polishing pad

Multi-structure chemical-mechanical foam polishing pad, method of manufacture, and use thereof, comprising: a primary structure, a surface-modified secondary structure, a protective structure, and bonding the primary structure to the surface-modified secondary structure the upper connector, and the lower connector that bonds the surface-modified secondary structure and the protective structure together.

25 2022/04

Manufacturing method of foam polishing pad

How much do you know about foam polishing pads

The geometry and surface of foam polishing pads are optimized for high removal rate and excellent surface finish, and are used in various precision foam polishing pad processes: pre-polishing, fine polishing, ultra-fine polishing, ultra-finishing, chemical mechanical polishing.

21 2022/04

How much do you know about foam polishing pads